The SAS System                             21:58 Saturday, July 12, 2008   1

The Mixed Procedure

            Type 3 Analysis of Variance
 
                             Sum of
Source           DF         Squares     Mean Square

et                3        3.112158        1.037386
position          3        1.128892        0.376297
et*position       9        0.809475        0.089942
wafer(et)         8        4.274483        0.534310
Residual         24        2.667583        0.111149

                        Type 3 Analysis of Variance
 
                                                                      Error
Source       Expected Mean Square                   Error Term           DF

et           Var(Residual) + 4 Var(wafer(et))       MS(wafer(et))         8
             + Q(et,et*position)                                           
position     Var(Residual) +                        MS(Residual)         24
             Q(position,et*position)                                       
et*position  Var(Residual) + Q(et*position)         MS(Residual)         24
wafer(et)    Var(Residual) + 4 Var(wafer(et))       MS(Residual)         24
Residual     Var(Residual)                          .                     .

 Type 3 Analysis of Variance
 
Source       F Value    Pr > F

et              1.94    0.2015
position        3.39    0.0345
et*position     0.81    0.6125
wafer(et)       4.81    0.0013
Residual         .       .