The SAS System                         12:14 Wednesday, July 16, 2008   1

                                                        The Mixed Procedure

                                                   Covariance Parameter Estimates
 
                                                   Cov Parm              Estimate

                                                   lot(source)             119.89
                                                   wafer(source*lot)      35.8657
                                                   Residual               12.5694


                                                        Least Squares Means
 
                                                              Standard
                              Effect    source    Estimate       Error      DF    t Value    Pr > |t|

                              source    1          1995.11      5.7716       6     345.68      <.0001
                              source    2          2005.19      5.7716       6     347.43      <.0001


                                                 Differences of Least Squares Means
 
                                                                    Standard
                         Effect    source    _source    Estimate       Error      DF    t Value    Pr > |t|

                         source    1         2          -10.0833      8.1622       6      -1.24      0.2629