The SAS System                            12:09 Wednesday, July 16, 2008   1

The Mixed Procedure

                  Model Information

Data Set                     WORK.E_3_4               
Dependent Variable           Thick                    
Covariance Structure         Variance Components      
Estimation Method            Type 1                   
Residual Variance Method     Factor                   
Fixed Effects SE Method      Model-Based              
Degrees of Freedom Method    Containment              


             Class Level Information
 
Class    Levels    Values

lot           8    1 2 3 4 5 6 7 8               
wafer         3    1 2 3                         
site          3    1 2 3                         


            Dimensions

Covariance Parameters             3
Columns in X                      1
Columns in Z                     32
Subjects                          1
Max Obs Per Subject              72


          Number of Observations

Number of Observations Read              72
Number of Observations Used              72
Number of Observations Not Used           0


           Type 1 Analysis of Variance
 
                            Sum of
Source          DF         Squares     Mean Square

lot              7     9025.319444     1289.331349
wafer(lot)      16     1922.666667      120.166667
Residual        48      603.333333       12.569444

                        Type 1 Analysis of Variance
 
                                                                      Error
Source      Expected Mean Square                  Error Term             DF

lot         Var(Residual) + 3 Var(wafer(lot))     MS(wafer(lot))         16
            + 9 Var(lot)                                                   
wafer(lot)  Var(Residual) + 3 Var(wafer(lot))     MS(Residual)           48
Residual    Var(Residual)                         .                       .

The SAS System                            12:09 Wednesday, July 16, 2008   2

The Mixed Procedure

 Type 1 Analysis of Variance
 
Source      F Value    Pr > F

lot           10.73    <.0001
wafer(lot)     9.56    <.0001
Residual        .       .    


                     Covariance Parameter Estimates
 
                         Standard        Z
Cov Parm      Estimate      Error    Value       Pr Z    Alpha      Lower

lot             129.91    76.7205     1.69     0.0904     0.05   -20.4623
wafer(lot)     35.8657    14.1876     2.53     0.0115     0.05     8.0586
Residual       12.5694     2.5657     4.90     <.0001     0.05     8.7411

 Covariance Parameter
      Estimates
 
Cov Parm         Upper

lot             280.28
wafer(lot)     63.6729
Residual       19.6177


           Fit Statistics

-2 Res Log Likelihood           454.0
AIC (smaller is better)         460.0
AICC (smaller is better)        460.4
BIC (smaller is better)         460.3